
һICP
늸ϵxwlVxICPǸԇ|КBԭӣxӣlԺݗSwlݗܣͬĹVо|WMɵһNICPVxʹ÷ȸɱ͵cѽںܶИIõVđڸУІλ䑪øõ͑J
xaFWS-1000VxϵЮaƷڸУІλ÷dzɹĎVxc
1.Դ٬FԺzһ_PPb10|֮1ľԷV_5—6yhȽlV
2.ʴ_ȺܶȸߣRSD~0.5%عrg̣һֻ10-30
3.wЧICPһN6000-7000KĸߜؼlԴƷֽ^W̎õĘ˜ϵкƳcƷҺwɷ}ȵȸN|ʮƵҺͬrԴܶȸļlh——ͨЧͼlCʹICPԴлwЧСͻc
4.ͬrMжԪطٶȘOVɷڱнٺͲַǽԪ
5.yԇܛWINDOWSϵyܛܛɱOxBOxжNMķ` M㲻ͬ͑ͬƷĜyԇҪ
ICPϵБ÷
̖ | Ñλ | ÷ |
1 | Қvʷ^ | yԇմմ~oԶ |
2 | Ї|о | yԇNVӺ͌о |
3 | ɽ|ƼW | ڽ̌WyԇVƷNϽƷ |
ICPϵЮaƷ
FWS-1000ICPεV
ll
1. ·ͣ늸зʽԼʎ ·ͬS|ݔƥ{CȡʷM]hԄӿ
2. lʣ40MHz
3. lʷԣ0.1%
4. ݔʣ800W—1200W
5. ݔʷԣ0.2%
6. 늴ňй©ݗ䏊ȣC30cm̎ 늈E2V/m
ňH0.2A/m
7. Դ220V 25A
ֹ
1 · Czerny Turner
2 ࣺ 1000 mm
3 Ҏ xӿgȫϢ
̾ܶ3600/mm2400/mm
̾e80×110 mm
4 ֱʣ ≤ 0.008nm
5 貨L
3600/mm貨L195—500 nm
2400/mm貨L195—800 nm
6 M늙CС: ≤0.0006 nm
7 RҎ 78×105×16mm
8 Rφ3011
9 ɫɢʣ3600/mm 0.266nm/mm
2400/mm 0.4nm/mm
Cgָ
1. ٶȣ һ犃ȷ10Ԫ
2. ܶȣ ˜ƫRSD≤2%
3. ԣ ˜ƫRSD≤3%һСry
4.yԷ 10η
Ӝy·
1. 늱ҎR212UHR928
2. 늱ؓ߉
200-1000Vԣ0.05%
3. 늱y
10ؓ12η -10ؓ4ηA.
4. ̖ɼV/F׃Q1mV100Hz
Ҫc
aƷc
1. ٶȿ졡һ犷10Ԫ
2. ܶȸߡ˜ƫRSD≤2%
3. z͡Ҋ65NԪؙzޱ
4. ԪضࡡɌ70NԪMж
5. ݡķܛӷχʹT
6. Էͨ^yԪص2lVҷԴ_ԓԪصǷ
x_C,㼉Ծ_λo蹯MУoCȺܳęCе
WϵyϳɫܛCyĜʴ_ԄxNy
xԄУLλyԪغԄӴ_늱늉ͷŴ
ܛԄУɔ_ԄMбУVȿɴ10flVICPҪ
ѴV첢˸ɔ_r
ICP-2000늸ϵxwlVx
llRF
1·ͣ늸зʽԼʎ·ͬS|ݔƥ{CȡʷM]hԄӿ
2lʣ40MHZ±0.05%
3lʷԣ<0.1%
4ݔʣ8001200w
5ݔʷԣ≤0.3%
6늴ňй©䏊ȣC30cm 늈E 2V/m
Mb:
1ݔȦȏ25mm3
2ܣͬFassel⏽20mmʯӢ
3ͬS͇F⏽6mm
4pͲF⏽34mm
5ӋҎd≺Ҏ
ٵxwӋ100-1000L/h
1.6-16L/min
oӋ10-100L/h
Auxiliary gas flow meter10-100L/h
0.16-1.66L/min
dӋ10-100L/h
0.16-1.66L/min
dⷀy0-0.4MPa
yb:
1늱Ҏ R212UHR928
2늱ؓ߉200-1000V
<0.05%
3늱y10-12 -10-4A
4̖ɼV/FQ1mV100Hz
ֹ:
1·: Czerny- Turner
2: 1000mm
3ҎxӿgȫϢ̾ܶ3600/mm
4L195-500nm
x2400/mmL195800nm
̾e: 80X110mm
ɫɢʵ0.26nm
5ֱ: ≤1.008nm
6貨L3600/mm 貨L195-500nm2400/mm貨L195-800nm
7M늙CСࣺ0.0006nm
8Mp20m
9lRҎ78 X 105 X 16mm
10R3011
11ֹbã32±1
AAS
ԭչVDZo50ڳFԺulչһN͵ăx@NбyԪصĻBԭӌԭӹݗՏȁyԇбyԪصĺԭչVxʹ÷ȸɱ͵cѽںܶИIõVđڸУІλ䑪øõ͑J
xaAAS6000VxϵЮaƷڸУІλ÷dzɹ
ĎVxc
1.z`ȸԭշęz_ppbʯītԭշęz
_10-10-10-14g
2.ȺԭշyеȺߺԪص˜ʲ<1%ʴ_ѽӽڽ
Wʯītԭշķһs3-5%
3.ٶȿԭչVx35犃Bmy50ԇе6NԪ
4.÷VɜyԪ_70HԜyԪ,Ҳgԭշyǽ
ԪغЙC
5.x^
AASϵБ÷
|VaұIFɫٷ
h՚ˮ|wU
ʯͻpaƷԭͼӹaƷpaƷ
ʳƷtˎͱƷ
ϷմͿϵȣ
PI~
Wע"ԴƏV"ƷƏVδWڙDdժʽʹѫ@WڙƷڙ
ʹע"ԴƏV"`߱WP؟ϢעԕTx˾ lؓ؟ȷ؟