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名稱：WS-1000濕法刻蝕設備Wet Station
產地：美國
品牌：Laurell
濕法設備Wet Station
濕法刻蝕設備特征：
l All white polypropylene construction
l Any Laurell Spin Processor(s) installed
l Easy-access Nitrogen&DI Spray guns
l Need a smaller size?-see our MINI
l 全白色聚丙烯構造
l 可內置任何Laurell公司的勻膠機（即旋涂儀）
l 排放簡便的入氮口和DI噴頭
l 如果需要更小尺寸——有微型濕法設備Wet Station供選擇
GENERAL INFORMATION
濕法刻蝕設備一般信息
The Laurell WS-1000 Series Spin-Process Stations allow a fully configuredtested module to be constructedshipped complete-requiring only the minimum of installation time. Easy to loadoperate-everything is in convenient reach to the operator.
Laurell公司的WS-1000系列旋轉處理濕法設備Wet Station可以被配置成測試模塊構造，安裝簡便，易于拆卸，更便于操作者控制。
Typical processes for the WS-1000 include, but are not limited to:
Typical processes for the WS-1000 include, but are not limited to:
典型的WS-1000濕法刻蝕設備Wet Station處理過程包括（但不限于）：
l Coating
l Etching
l Developing-Aqueous/Solvent
l Cleaning-Aqueous/Solvent
l Yes, Sulfuric/Peroxide(insitu mixing)
l Yes, HBr
l Temperature-controlled Developing
l Rinsing/Drying
l 涂敷
l 蝕刻
l 開發-水/溶劑
l 清洗-水/溶劑
l 確認，硫酸/雙氧水（原樣混合）
l 確認，HBr
l 溫控開發
l 沖洗/烘干
Wet Station Features:
濕法刻蝕設備Wet Station特點：
All polypropylene construction(Self-extinguishing available-see below)
Accommodates the installation of any Laurell spin processor
Perforated wet-deck(easily removable)
Wet plenum
Exhaust Plenum with gauge
Isolated component/drawer below for heaters, pumps, vessels…
全聚丙烯構造（見下文的自滅火功能）
可兼容安裝任何Laurell 旋涂機
有排孔的濕隔層（易于拆除）
潮濕的空間
標準規格的排氣空間
被熱水器，水泵，容器等隔離的組件/容器
Wet StationOptions:
濕法刻蝕設備Wet Station選項：
l Processor exhaust interlockcontrol(standard on some models)
l Heating&insitu material stirring
l Rinse to resistivity
l Drain diverter(s)
l Vacuum loading wand
l Wafer cassette stand
l Leak detection
l Light towers
l 排氣聯鎖控制處理器（一些型號是標準的）
l 加熱和原材料攪拌
l 抵抗力沖洗
l 排水轉向裝置
l 真空負荷棒
l 晶片盒座
l 檢漏
l 輕塔
Advanced materials available if required
濕法刻蝕設備Wet Station可以根據要求采用更高級的材料
Better
更好的濕法設備Wet Station
WS-1000-CP5-meets SEMI S93 specification for fire safety in clean room applications. CP5 meets UL94 V-O fire classification. It has an excellent babance of physical properties, chemical resistancefire safety.
WS-1000-CP5 濕法設備Wet Station符合SEMI S93標準應用在消防安全和潔凈空間等領域。CP5符合UL94 V-O 火災分類標準。它具有優良的平衡的物理性能，耐化學藥品性和耐火性。
Best
*佳的濕法設備Wet Station
WS-1000-CP7-D-a flame retardant polypropylene formulation who’s flame retardant characteristics meet the most rigorous FMRC 4910 testing standards for most aspects of flame retardation, self-extinguishing characteristicsburn-through. This advanced material also meets or exceeds test standards for low smoke generationminimal toxic by-products.
WS-1000-CP7-D濕法設備Wet Station的材料阻燃特性符合*嚴格的FMRC 4910測試標準，滿足多方面條件下的難燃性，自熄特點和徹底燃燒。這種的材料也達到或超過產生低煙和*小毒副產品的檢測標準。
