| The NicoletTM ECOTM 1000 is a high-performance, FT-IR metrology tool designed to serve the semiconductor manufacturing industry. It can be used for measuring dopant concentration levels in dielectric films (BPSG, PSG, FSG, etc.), hydrogen levels in silicon nitride films, epitaxial film thickness, MEMS device thickness, and substitutional carbon and interstitial oxygen levels in silicon wafers. The ECO 1000 can be used with wafers ranging from 100 mm to 200 mm in diameter. The ECO 1000 comes in several configurations, including manual wafer loading configurations, open cassette sorting configurations, and configurations compliant with SEMI S2 and S8-95 safety and ergonomic specs. |
